"A small amount of diluted hydrofluoric acid leaked Monday morning during maintenance at one of the gas and chemical supply systems at the Hwaseong site," Samsung said in an statement.
The Hwaseong plant is located south of Seoul.
Samsung said five contract workers at the scene were sent to hospital for treatment.
Four of them were discharged, while one died due to complications.
Production was not affected by the incident, and the situation has been contained, the company said.
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